PELIICAEN (Plateforme pour l’Etude de L’Implantation Ionique Contrôlée et Analysée à l’Echelle Nanométrique)
The goal of the PELIICAEN project is to develop a platform allowing creation, modification and analysis of nano-structures and their controlled 3-D doping.
In this project a new approach, combining known technologies based on FIB and ECRIS techniques, aims to produce focused ion beams with a much larger choice of ion species and implantation techniques than currently available.
This project implies the cooperation between 5 teams of the CIMAP (AMA, MADIR, LIOA, SIMUL and CIRIL), as well as the collaboration with Orsay Physics, a French SMB and one of the world leaders for the development and commercialization of FIB/FEB units and secondary emission imagery.
Contact : Stéphane Guillous